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- 2006499722 contributor B10688856.
- 2006499722 contributor B10688857.
- 2006499722 contributor B10688858.
- 2006499722 created "c2003.".
- 2006499722 date "2003".
- 2006499722 date "c2003.".
- 2006499722 dateCopyrighted "c2003.".
- 2006499722 description "Includes bibliographical references.".
- 2006499722 extent "310 p. :".
- 2006499722 identifier "380072748X".
- 2006499722 identifier 2006499722.html.
- 2006499722 isPartOf "GMM-Fachbericht ; 39".
- 2006499722 issued "2003".
- 2006499722 issued "c2003.".
- 2006499722 language "eng".
- 2006499722 publisher "Berlin : VDE-Verlag,".
- 2006499722 subject "621.3815/31 22".
- 2006499722 subject "Integrated circuits Masks Congresses.".
- 2006499722 subject "Microlithography Congresses.".
- 2006499722 subject "TK7872.M3 E97 2003b".
- 2006499722 title "EMC 2003 : 19th European Mask Conference on Mask Technology for Integrated Circuits and Micro-components : lectures held at the GMM-Conference, January 13-15, 2003 in Sonthofen, Germany / conference chairperson, Uwe Behringer ; organizer, VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) ; in cooperation with Semiconductor Equipment and Materials International ... [et al.].".
- 2006499722 type "text".