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- 2012359231 contributor B12531955.
- 2012359231 contributor B12531956.
- 2012359231 contributor B12531957.
- 2012359231 created "c2010.".
- 2012359231 date "2010".
- 2012359231 date "c2010.".
- 2012359231 dateCopyrighted "c2010.".
- 2012359231 description "Includes bibliographical references and indexes.".
- 2012359231 extent "ix, 211 p. :".
- 2012359231 identifier "1605111953".
- 2012359231 identifier "9781605111957".
- 2012359231 identifier 2012359231-d.html.
- 2012359231 isPartOf "Materials Research Society symposia proceedings v. 1222.".
- 2012359231 isPartOf "Materials Research Society symposium proceedings, 1946-4274 ; v. 1222".
- 2012359231 issued "2010".
- 2012359231 issued "c2010.".
- 2012359231 language "eng".
- 2012359231 publisher "Warrendale, Pa. : Materials Research Society,".
- 2012359231 subject "621.381 23".
- 2012359231 subject "Microelectromechanical systems Congresses.".
- 2012359231 subject "Microelectromechanical systems Materials Congresses.".
- 2012359231 subject "Nanostructured materials Congresses.".
- 2012359231 subject "Silicon Congresses.".
- 2012359231 subject "TK7875 .M3723 2009".
- 2012359231 subject "Thin films Congresses.".
- 2012359231 title "Microelectromechanical systems--materials and devices III : symposium held November 30-December 2, 2009, Boston, Massachusetts, U.S.A. / editors, Jörg Bagdahn ... [et al.].".
- 2012359231 type "text".