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- 63020631 contributor B1557132.
- 63020631 created "[c1963]".
- 63020631 date "1963".
- 63020631 date "[c1963]".
- 63020631 dateCopyrighted "[c1963]".
- 63020631 description "Bibliography: p. 515-522.".
- 63020631 extent "xii, 532 p.".
- 63020631 issued "1963".
- 63020631 issued "[c1963]".
- 63020631 language "eng".
- 63020631 publisher "New York, Wiley".
- 63020631 subject "621.55".
- 63020631 subject "TJ940 .G8".
- 63020631 subject "Vacuum technology.".
- 63020631 title "Vacuum technology.".
- 63020631 type "text".