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- 82083529 contributor B4211689.
- 82083529 contributor B4211690.
- 82083529 contributor B4211691.
- 82083529 created "c1983.".
- 82083529 date "1983".
- 82083529 date "c1983.".
- 82083529 dateCopyrighted "c1983.".
- 82083529 description "Includes bibliographical references and index.".
- 82083529 extent "559 p. :".
- 82083529 isPartOf "ASTM special technical publication ; 804".
- 82083529 issued "1983".
- 82083529 issued "c1983.".
- 82083529 language "eng".
- 82083529 publisher "Philadelphia, Pa. (1916 Race St., Philadelphia 19103) : ASTM,".
- 82083529 subject "621.3815/2 19".
- 82083529 subject "Semiconductors Congresses.".
- 82083529 subject "Silicon Congresses.".
- 82083529 subject "TK7871.15.S55 S55 1983".
- 82083529 title "Silicon processing : a symposium / sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor.".
- 82083529 type "text".