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- 95060437 contributor B7502412.
- 95060437 contributor B7502413.
- 95060437 contributor B7502414.
- 95060437 created "c1995.".
- 95060437 date "1995".
- 95060437 date "c1995.".
- 95060437 dateCopyrighted "c1995.".
- 95060437 description "Includes bibliographical references and index.".
- 95060437 extent "x, 629 p. :".
- 95060437 identifier "1566770963".
- 95060437 isPartOf "Proceedings (Electrochemical Society) ; v. 95-2.".
- 95060437 isPartOf "Proceedings ; v. 95-2".
- 95060437 issued "1995".
- 95060437 issued "c1995.".
- 95060437 language "eng".
- 95060437 publisher "Pennington, NJ : Electrochemical Society,".
- 95060437 subject "621.3815/2 21".
- 95060437 subject "Process control Congresses.".
- 95060437 subject "Semiconductor industry Production control Congresses.".
- 95060437 subject "Semiconductors Design and construction Congresses.".
- 95060437 subject "TK7871.85 .S9745 1995".
- 95060437 title "Proceedings of the Symposium om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing / organizers/editors, M. Meyyappan, D.J. Economou, S.W. Butler; [sponsored by] Dielectric Science and Technologyand Electronics Divisions.".
- 95060437 type "text".