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- 97006201 contributor B8030699.
- 97006201 created "c1997.".
- 97006201 date "1997".
- 97006201 date "c1997.".
- 97006201 dateCopyrighted "c1997.".
- 97006201 description "Includes bibliographical references and indexes.".
- 97006201 extent "ix, 242 p. :".
- 97006201 identifier "1558993487".
- 97006201 identifier 97006201-d.html.
- 97006201 isPartOf "Materials Research Society symposia proceedings ; v. 444.".
- 97006201 isPartOf "Materials Research Society symposium proceedings ; v. 444".
- 97006201 issued "1997".
- 97006201 issued "c1997.".
- 97006201 language "eng".
- 97006201 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 97006201 subject "621.381 21".
- 97006201 subject "Electromechanical devices Materials Congresses.".
- 97006201 subject "Microelectronics Materials Congresses.".
- 97006201 subject "Optical films Congresses.".
- 97006201 subject "TK7870 .M384 1997".
- 97006201 subject "Thin films Congresses.".
- 97006201 title "Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. / editors, Michael L. Reed ... [et al.].".
- 97006201 type "text".