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- 99016530 contributor B8636359.
- 99016530 created "c1999.".
- 99016530 date "1999".
- 99016530 date "c1999.".
- 99016530 dateCopyrighted "c1999.".
- 99016530 description "Includes bibliographical references and index.".
- 99016530 extent "xi, 298 p. :".
- 99016530 identifier "0272-9172".
- 99016530 identifier "1558994750".
- 99016530 identifier 99016530-d.html.
- 99016530 isPartOf "Materials Research Society symposia proceedings ; v. 568.".
- 99016530 isPartOf "Materials Research Society symposium proceedings ; v. 568".
- 99016530 issued "1999".
- 99016530 issued "c1999.".
- 99016530 language "eng".
- 99016530 publisher "Warrendale, Penn. : Materials Research Society,".
- 99016530 subject "621.3815/2 21".
- 99016530 subject "Semiconductor doping Congresses.".
- 99016530 subject "Semiconductors Defects Congresses.".
- 99016530 subject "Semiconductors Design and construction Congresses.".
- 99016530 subject "Silicon Congresses.".
- 99016530 subject "TK7871.85 .S536 1999".
- 99016530 title "Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A. / editors, Hans-Joachim L. Gossmann ... [et al.].".
- 99016530 type "text".