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- 99052406 contributor B8676627.
- 99052406 created "c2000.".
- 99052406 date "2000".
- 99052406 date "c2000.".
- 99052406 dateCopyrighted "c2000.".
- 99052406 description "Includes bibliographical references and index.".
- 99052406 extent "xix, 265 p. :".
- 99052406 identifier "0890065810 (alk. paper)".
- 99052406 isPartOf "Microelectromechanical systems series".
- 99052406 issued "2000".
- 99052406 issued "c2000.".
- 99052406 language "eng".
- 99052406 publisher "Boston : Artech House,".
- 99052406 subject "621.381 21".
- 99052406 subject "Microelectromechanical systems.".
- 99052406 subject "TK7875 .M35 2000".
- 99052406 title "An introduction to microelectromechanical systems engineering / Nadim Maluf.".
- 99052406 type "text".