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- 01HK7ZYPHPK4C103938HY4CFS4 classification C1.
- 01HK7ZYPHPK4C103938HY4CFS4 date "2022".
- 01HK7ZYPHPK4C103938HY4CFS4 language "eng".
- 01HK7ZYPHPK4C103938HY4CFS4 type conference.
- 01HK7ZYPHPK4C103938HY4CFS4 hasPart 01HK80ECV27D51K85H1BAAVCTS.pdf.
- 01HK7ZYPHPK4C103938HY4CFS4 subject "Technology and Engineering".
- 01HK7ZYPHPK4C103938HY4CFS4 doi "10.1109/eptc56328.2022.10013279".
- 01HK7ZYPHPK4C103938HY4CFS4 isbn "9798350398854".
- 01HK7ZYPHPK4C103938HY4CFS4 presentedAt urn:uuid:700ecaa0-cea8-4c22-ba38-d7f6085cc09d.
- 01HK7ZYPHPK4C103938HY4CFS4 abstract "The semiconductor industry can no longer count on monolithic integration to accomplish the economic benefits of the previous era. Now, new packaging solutions are being adopted to achieve the commercial advantages that were previously met with silicon scaling. The role of heterogeneous integration, especially micro-chiplets, is pivotal in this new era. Several techniques are being investigated to allow for massive but still precise assembly of small semiconductor chiplets, including contact transfer printing, fluidic assembly, and laser-induced forward-transfer (LIFT) printing. In addition to very high transfer rates, laser-based mass transfer offers the advantages of being truly selective, and extremely flexible in terms of dimensions and materials. This study presents a combined approach for micro-chiplet preparation and assembly, with a systematic investigation into the transfer accuracy of 200×200 µm 2 Si micro-chiplets as a function of various experimental conditions which would be useful for heterogeneous integration of different micro-chiplets in systems-in-package applications.".
- 01HK7ZYPHPK4C103938HY4CFS4 author F6851142-F0ED-11E1-A9DE-61C894A0A6B4.
- 01HK7ZYPHPK4C103938HY4CFS4 author cb5570db-c324-11eb-87b9-9376024df064.
- 01HK7ZYPHPK4C103938HY4CFS4 dateCreated "2024-01-03T15:44:27Z".
- 01HK7ZYPHPK4C103938HY4CFS4 dateModified "2024-10-29T18:29:05Z".
- 01HK7ZYPHPK4C103938HY4CFS4 name "Laser-induced forward transfer for assembly of silicon micro-chiplets".
- 01HK7ZYPHPK4C103938HY4CFS4 pagination urn:uuid:bd347777-61c1-4d13-aed6-9f66ad9da23e.
- 01HK7ZYPHPK4C103938HY4CFS4 publisher urn:uuid:1788ac67-ca3b-4ca0-883f-e4330d5522f0.
- 01HK7ZYPHPK4C103938HY4CFS4 sameAs LU-01HK7ZYPHPK4C103938HY4CFS4.
- 01HK7ZYPHPK4C103938HY4CFS4 sourceOrganization urn:uuid:286c739c-cbf6-4f24-82ff-5c64afeb0948.
- 01HK7ZYPHPK4C103938HY4CFS4 sourceOrganization urn:uuid:88d96f47-8609-4621-ab4c-cd61e12d13f5.
- 01HK7ZYPHPK4C103938HY4CFS4 type C1.