Matches in UGent Biblio for { <https://biblio.ugent.be/publication/1057243#aggregation> ?p ?o. }
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- aggregation classification "C3".
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- aggregation date "2010".
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- aggregation language "eng".
- aggregation subject "Technology and Engineering".
- aggregation title "Stiction reduction in electrostatic poly-SiGe micromirrors by applying a self-assembled monolayer film".
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- aggregation endPage "47".
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