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- aggregation classification "P1".
- aggregation creator B72383.
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- aggregation date "2010".
- aggregation format "application/pdf".
- aggregation hasFormat 1057335.bibtex.
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- aggregation isPartOf urn:issn:1938-5862.
- aggregation language "eng".
- aggregation publisher "Electrochemical Society (ECS)".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Technology and Engineering".
- aggregation title "SiGe MEMS technology: a platform technology enabling different demonstrators".
- aggregation abstract "In imec's 200mm fab a dedicated poly-SiGe above-IC MEMS (Micro Electro-Mechanical Systems) platform has been set up to integrate MEMS and its readout and driving electronics on one chip. In the Flemish project Gemini the possibilities of this platform have been further explored together with the project partners. Three different demonstrators were realized: mirrors for display applications, grating light valves (GLV) and accelerometers. Whereas the mirrors and GLVs are made with a similar to 300 nm thick SiGe structural layer plus optical coating, the SiGe structural layer thickness for the accelerometers is 4 mu m in order to improve the capacitive readout of in-plane devices. The processing and measurement results of these functional demonstrators are shown in this paper. These new demonstrators reconfirm the generic nature of the SiGe MEMS platform.".
- aggregation authorList BK184279.
- aggregation endPage "812".
- aggregation issue "6".
- aggregation startPage "799".
- aggregation volume "33".
- aggregation aggregates 1080273.
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