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- aggregation classification "A1".
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- aggregation creator B419462.
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- aggregation date "2009".
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- aggregation isPartOf urn:issn:0042-207X.
- aggregation language "eng".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Physics and Astronomy".
- aggregation title "Chemical kinetics simulation of deposition and sp2/sp3 bond ratio of diamond-like carbon film in plasma".
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- aggregation endPage "S144".
- aggregation issue "suppl. 1".
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- aggregation similarTo j.vacuum.2009.01.047.
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