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- aggregation classification "C3".
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- aggregation date "2009".
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- aggregation publisher "AVS. Advanced Surface Engineering Division".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Physics and Astronomy".
- aggregation title "Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering: the method and results".
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