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- aggregation classification "C3".
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- aggregation date "2010".
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- aggregation language "eng".
- aggregation publisher "European Society of Thin Films".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Chemistry".
- aggregation title "Analysis of the behaviour of the reactive species in reactive magnetron sputtering of oxides".
- aggregation authorList BK165959.
- aggregation endPage "521".
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