Matches in UGent Biblio for { <https://biblio.ugent.be/publication/162152#aggregation> ?p ?o. }
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- aggregation classification "C1".
- aggregation creator B65161.
- aggregation creator person.
- aggregation creator person.
- aggregation date "2002".
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- aggregation language "eng".
- aggregation subject "Science General".
- aggregation title "Uniformity Control in Sputter Deposition Processes.".
- aggregation authorList BK164705.
- aggregation endPage "141".
- aggregation startPage "135".
- aggregation isDescribedBy 162152.
- aggregation similarTo LU-162152.