Matches in UGent Biblio for { <https://biblio.ugent.be/publication/2154260#aggregation> ?p ?o. }
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- aggregation classification "A1".
- aggregation creator B189725.
- aggregation creator B189726.
- aggregation creator B189727.
- aggregation creator person.
- aggregation creator person.
- aggregation creator person.
- aggregation creator person.
- aggregation creator person.
- aggregation date "2012".
- aggregation format "application/pdf".
- aggregation hasFormat 2154260.bibtex.
- aggregation hasFormat 2154260.csv.
- aggregation hasFormat 2154260.dc.
- aggregation hasFormat 2154260.didl.
- aggregation hasFormat 2154260.doc.
- aggregation hasFormat 2154260.json.
- aggregation hasFormat 2154260.mets.
- aggregation hasFormat 2154260.mods.
- aggregation hasFormat 2154260.rdf.
- aggregation hasFormat 2154260.ris.
- aggregation hasFormat 2154260.txt.
- aggregation hasFormat 2154260.xls.
- aggregation hasFormat 2154260.yaml.
- aggregation isPartOf urn:issn:0743-7463.
- aggregation language "eng".
- aggregation rights "I don't know the status of the copyright for this publication".
- aggregation subject "Physics and Astronomy".
- aggregation title "In situ monitoring of atomic layer deposition in nanoporous thin films using ellipsometric porosimetry".
- aggregation abstract "Ellipsometric porosimetry (EP) is a handy technique to characterize the porosity and pore size distribution of porous thin films with pore diameters in the range from below 1 nm up to 50 nm and for the characterization of porous low-k films especially. Atomic layer deposition (ALD) can be used to functionalize porous films and membranes, e.g., for the development of filtration and sensor devices and catalytic surfaces. In this work we report on the implementation of the EP technique onto an ALD reactor. This combination allowed us to employ EP for monitoring the modification of a porous thin film through ALD without removing the sample from the deposition setup. The potential of in situ EP for providing information about the effect of ALD coating on the accessible porosity, the pore radius distribution, the thickness, and mechanical properties of a porous film is demonstrated in the ALD of TiO2 in a mesoporous silica film.".
- aggregation authorList BK447627.
- aggregation endPage "3859".
- aggregation issue "8".
- aggregation startPage "3852".
- aggregation volume "28".
- aggregation aggregates 2154315.
- aggregation isDescribedBy 2154260.
- aggregation similarTo la300045z.
- aggregation similarTo LU-2154260.