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- aggregation classification "A1".
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- aggregation creator person.
- aggregation creator person.
- aggregation date "2003".
- aggregation hasFormat 219419.bibtex.
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- aggregation isPartOf urn:issn:0169-4332.
- aggregation language "eng".
- aggregation publisher "Elsevier Science".
- aggregation subject "Technology and Engineering".
- aggregation title "Excimer laser microvia-technology in multichip modules".
- aggregation authorList BK246165.
- aggregation endPage "176".
- aggregation startPage "171".
- aggregation volume "208".
- aggregation isDescribedBy 219419.
- aggregation similarTo LU-219419.