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- aggregation classification "C1".
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- aggregation creator person.
- aggregation creator person.
- aggregation date "1991".
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- aggregation language "eng".
- aggregation subject "Technology and Engineering".
- aggregation title "Influence of S1CI4 reactive ion etching on the electrical characteristics of GaAs.".
- aggregation authorList BK170637.
- aggregation endPage "107".
- aggregation startPage "104".
- aggregation volume "227".
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