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- aggregation classification "A1".
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- aggregation date "2004".
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- aggregation isPartOf urn:issn:0142-2421.
- aggregation language "eng".
- aggregation publisher "JOHN WILEY & SONS LTD".
- aggregation subject "Science General".
- aggregation title "Effect of the oxyzen deficiency of ceramic TiO2-x targets on the deposition of TiO2 thin films by DC magnetron sputtering".
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- aggregation endPage "1170".
- aggregation issue "8".
- aggregation startPage "1167".
- aggregation volume "36".
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