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- aggregation classification "C3".
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- aggregation creator person.
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- aggregation date "2012".
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- aggregation language "eng".
- aggregation rights "I have retained and own the full copyright for this publication".
- aggregation subject "Physics and Astronomy".
- aggregation title "Modeling the time dependency of the reactive sputter process".
- aggregation authorList BK341682.
- aggregation aggregates 2988864.
- aggregation isDescribedBy 2988863.
- aggregation similarTo LU-2988863.