Matches in UGent Biblio for { <https://biblio.ugent.be/publication/3059827#aggregation> ?p ?o. }
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- aggregation classification "P1".
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- aggregation date "2012".
- aggregation format "application/pdf".
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- aggregation isPartOf urn:isbn:9781457707339.
- aggregation language "eng".
- aggregation publisher "IEEE".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Technology and Engineering".
- aggregation title "Si photonic device uniformity improvement using wafer-scale location specific processing".
- aggregation abstract "We report two-fold improvement in Si photonic device uniformity over a 200mm SOI wafer through location specific processing. A within wafer thickness non-uniformity of 0.8nm yielding a grating fiber-coupler peak-wavelength non-uniformity of 1.8nm is achieved.".
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