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- aggregation classification "A1".
- aggregation creator person.
- aggregation creator person.
- aggregation date "2015".
- aggregation format "application/pdf".
- aggregation hasFormat 5841692.bibtex.
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- aggregation isPartOf urn:issn:0013-5194.
- aggregation language "eng".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Technology and Engineering".
- aggregation title "Compact thermally actuated latching MEMS switch with large contact force".
- aggregation abstract "A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact configuration of thermal actuators. In the proposed latching mechanism, the necessary displacement of one of the contacts can be reduced, allowing the use of a linear thermal actuator. This linear actuator together with a V-shaped actuator can be aligned next to each other, requiring less area than the classical latching switch design. Another advantage of the proposed design is the high contact force of 1.33 mN, ensuring a stable contact resistance. The latching switch was fabricated in the Metal multi-user MEMS processes (MUMPs) technology and its functionality was successfully tested. In the latched state, a switch resistance of 0.6 Ω was measured.".
- aggregation authorList BK1323227.
- aggregation endPage "U1234".
- aggregation issue "1".
- aggregation startPage "80".
- aggregation volume "51".
- aggregation aggregates 5841732.
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- aggregation similarTo el.2014.3234.
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