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- aggregation classification "A1".
- aggregation creator B506065.
- aggregation creator B506066.
- aggregation creator person.
- aggregation creator person.
- aggregation creator person.
- aggregation date "2009".
- aggregation format "application/pdf".
- aggregation hasFormat 784114.bibtex.
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- aggregation isPartOf urn:issn:0013-5194.
- aggregation language "eng".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Technology and Engineering".
- aggregation title "Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab".
- aggregation abstract "Fabless access to wafer-scale silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology and opens up new exciting areas for research at the same time. It is only by using wafer-scale technology that this emerging field will be able to realise its promise: to become a disruptive technology. At the basis of the rationale for silicon photonics is a complex of photonic functions integrated on a single chip, coupled to a stable, high-yield volume fabrication technology base. ePIXfab is a service platform offering R&D oriented access to state-of-the-art 200 mm wafer-scale CMOS technology optimised for silicon photonics purposes.".
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- aggregation endPage "582".
- aggregation issue "12".
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- aggregation volume "45".
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- aggregation similarTo el.2009.1353.
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