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- aggregation classification "A1".
- aggregation creator B330038.
- aggregation creator person.
- aggregation creator person.
- aggregation creator person.
- aggregation creator person.
- aggregation date "2008".
- aggregation format "application/pdf".
- aggregation hasFormat 859480.bibtex.
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- aggregation isPartOf urn:issn:0306-8919.
- aggregation language "eng".
- aggregation rights "I have transferred the copyright for this publication to the publisher".
- aggregation subject "Technology and Engineering".
- aggregation title "Closed-loop modeling of silicon nanophotonics from design to fabrication and back again".
- aggregation abstract "We present a method for component-centric modeling of silicon nanophotonics, where a closed optimization loop allows to take the effects of the fabrication process into account during the design of nanophotonic components. This enables black-box component descriptions with functional parameters. Underlying mask layouts of the components can then automatically be optimized for their actual performance, and not just for their geometric layout. To simulate the effect of fabrication, we developed a projection lithography simulator which was included inside the optimization loop. This method was applied to the design of a 1-dimensional distributed Bragg mirror.".
- aggregation authorList BK622359.
- aggregation endPage "811".
- aggregation issue "11-12".
- aggregation startPage "801".
- aggregation volume "40".
- aggregation aggregates 859486.
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