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- HARMST abstract "HARMST is an acronym for High Aspect Ratio Microstructure Technology that describes fabrication technologies,used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.".
- HARMST wikiPageExternalLink 56.
- HARMST wikiPageID "23431978".
- HARMST wikiPageRevisionID "578758987".
- HARMST hasPhotoCollection HARMST.
- HARMST subject Category:Materials_science.
- HARMST subject Category:Microtechnology.
- HARMST comment "HARMST is an acronym for High Aspect Ratio Microstructure Technology that describes fabrication technologies,used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.".
- HARMST label "HARMST".
- HARMST sameAs m.06w5rcx.
- HARMST sameAs Q5628952.
- HARMST sameAs Q5628952.
- HARMST wasDerivedFrom HARMST?oldid=578758987.
- HARMST isPrimaryTopicOf HARMST.