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- Isotropic_etching abstract "In semiconductor technology isotropic etching is non-directional removal of material from a substrate via a chemical process using an etchant substance. The etchant may be a corrosive liquid or a chemically active ionized gas, known as a plasma.Isotropic etching is most easily understood by comparison to anisotropic (or non-isotropic) etching. The most important commercial application of anisotropic etching is in semiconductor chip processing, where photolithography is used to print resist lines on silicon wafers. To adequately reproduce very tiny lines (below 0.1 micrometer) into underlying silicon and metal layers on a wafer held in the horizontal plane, the direction of etching must be vertical only. The etchant may not be permitted to spread in the horizontal plane.Isotropic etching may occur unavoidably, or it may be desirable for process reasons.".
- Isotropic_etching wikiPageID "170429".
- Isotropic_etching wikiPageRevisionID "590193009".
- Isotropic_etching hasPhotoCollection Isotropic_etching.
- Isotropic_etching subject Category:Semiconductors.
- Isotropic_etching type Abstraction100002137.
- Isotropic_etching type Conductor114821043.
- Isotropic_etching type Material114580897.
- Isotropic_etching type Matter100020827.
- Isotropic_etching type Part113809207.
- Isotropic_etching type PhysicalEntity100001930.
- Isotropic_etching type Relation100031921.
- Isotropic_etching type Semiconductor114821248.
- Isotropic_etching type Semiconductors.
- Isotropic_etching type Substance100019613.
- Isotropic_etching comment "In semiconductor technology isotropic etching is non-directional removal of material from a substrate via a chemical process using an etchant substance. The etchant may be a corrosive liquid or a chemically active ionized gas, known as a plasma.Isotropic etching is most easily understood by comparison to anisotropic (or non-isotropic) etching.".
- Isotropic_etching label "Isotropic etching".
- Isotropic_etching sameAs m.016vdx.
- Isotropic_etching sameAs Q6086567.
- Isotropic_etching sameAs Q6086567.
- Isotropic_etching sameAs Isotropic_etching.
- Isotropic_etching wasDerivedFrom Isotropic_etching?oldid=590193009.
- Isotropic_etching isPrimaryTopicOf Isotropic_etching.