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- Krypton_fluoride_laser abstract "For background information about krypton and fluorine, the two active elements in a krypton fluoride laser, see Krypton and Fluorine.A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research. The term excimer is short for 'excited dimer', while exciplex is short for 'excited complex'. An excimer laser typically uses a mixture of a noble gas (argon, krypton, or xenon) and a halogen gas (fluorine or chlorine), which under suitable conditions of electrical stimulation and high pressure, emits coherent stimulated radiation (laser light) in the ultraviolet range.KrF (and ArF) excimer lasers are widely used in high-resolution photolithography machines, one of the critical technologies required for microelectronic chip manufacturing. Excimer laser lithography has enabled transistor feature sizes to shrink from 0.5 micrometer in 1990 to below 45 nanometers in 2010.".
- Krypton_fluoride_laser wikiPageExternalLink lasercreation.htm.
- Krypton_fluoride_laser wikiPageExternalLink nike.html.
- Krypton_fluoride_laser wikiPageExternalLink fs_krf.htm.
- Krypton_fluoride_laser wikiPageID "2238022".
- Krypton_fluoride_laser wikiPageRevisionID "598041648".
- Krypton_fluoride_laser hasPhotoCollection Krypton_fluoride_laser.
- Krypton_fluoride_laser subject Category:Excimer_lasers.
- Krypton_fluoride_laser subject Category:Fluorine.
- Krypton_fluoride_laser subject Category:Krypton.
- Krypton_fluoride_laser subject Category:Krypton_compounds.
- Krypton_fluoride_laser type Artifact100021939.
- Krypton_fluoride_laser type Device103183080.
- Krypton_fluoride_laser type ExcimerLasers.
- Krypton_fluoride_laser type Instrumentality103575240.
- Krypton_fluoride_laser type Laser103643253.
- Krypton_fluoride_laser type Object100002684.
- Krypton_fluoride_laser type OpticalDevice103851341.
- Krypton_fluoride_laser type PhysicalEntity100001930.
- Krypton_fluoride_laser type Whole100003553.
- Krypton_fluoride_laser comment "For background information about krypton and fluorine, the two active elements in a krypton fluoride laser, see Krypton and Fluorine.A krypton fluoride laser (KrF laser) is a particular type of excimer laser, which is sometimes (more correctly) called an exciplex laser. With its 248 nanometer wavelength, it is a deep ultraviolet laser which is commonly used in the production of semiconductor integrated circuits, industrial micromachining, and scientific research.".
- Krypton_fluoride_laser label "Krypton fluoride laser".
- Krypton_fluoride_laser label "Laser à fluorure de krypton".
- Krypton_fluoride_laser label "Láser de fluoruro de kriptón".
- Krypton_fluoride_laser label "ليزر فلوريد الكريبتون".
- Krypton_fluoride_laser sameAs Láser_de_fluoruro_de_kriptón.
- Krypton_fluoride_laser sameAs Laser_à_fluorure_de_krypton.
- Krypton_fluoride_laser sameAs m.06y9nb.
- Krypton_fluoride_laser sameAs Q3028383.
- Krypton_fluoride_laser sameAs Q3028383.
- Krypton_fluoride_laser sameAs Krypton_fluoride_laser.
- Krypton_fluoride_laser wasDerivedFrom Krypton_fluoride_laser?oldid=598041648.
- Krypton_fluoride_laser isPrimaryTopicOf Krypton_fluoride_laser.