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- Microelectromechanical_systems abstract "Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre (i.e. 0.02 to 1.0 mm). They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the surroundings such as microsensors. At these size scales, the standard constructs of classical physics are not always useful. Because of the large surface area to volume ratio of MEMS, surface effects such as electrostatics and wetting dominate over volume effects such as inertia or thermal mass.The potential of very small machines was appreciated before the technology existed that could make them—see, for example, Richard Feynman's famous 1959 lecture There's Plenty of Room at the Bottom. MEMS became practical once they could be fabricated using modified semiconductor device fabrication technologies, normally used to make electronics. These include molding and plating, wet etching (KOH, TMAH) and dry etching (RIE and DRIE), electro discharge machining (EDM), and other technologies capable of manufacturing small devices. An early example of a MEMS device is the resonistor – an electromechanical monolithic resonator.".
- Microelectromechanical_systems thumbnail MEMsfounding.jpg?width=300.
- Microelectromechanical_systems wikiPageExternalLink 180.
- Microelectromechanical_systems wikiPageID "19638".
- Microelectromechanical_systems wikiPageRevisionID "605204056".
- Microelectromechanical_systems hasPhotoCollection Microelectromechanical_systems.
- Microelectromechanical_systems subject Category:Electrical_engineering.
- Microelectromechanical_systems subject Category:Mechanical_engineering.
- Microelectromechanical_systems subject Category:Microelectronic_and_microelectromechanical_systems.
- Microelectromechanical_systems subject Category:Microtechnology.
- Microelectromechanical_systems subject Category:Transducers.
- Microelectromechanical_systems type Artifact100021939.
- Microelectromechanical_systems type Device103183080.
- Microelectromechanical_systems type ElectricalDevice103269401.
- Microelectromechanical_systems type Instrumentality103575240.
- Microelectromechanical_systems type Object100002684.
- Microelectromechanical_systems type PhysicalEntity100001930.
- Microelectromechanical_systems type Transducer104470953.
- Microelectromechanical_systems type Transducers.
- Microelectromechanical_systems type Whole100003553.
- Microelectromechanical_systems comment "Microelectromechanical systems (MEMS) (also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems and the related micromechatronics) is the technology of very small devices; it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology.".
- Microelectromechanical_systems label "MEMS".
- Microelectromechanical_systems label "MEMS".
- Microelectromechanical_systems label "Micro Electro-Mechanical Systems".
- Microelectromechanical_systems label "Micro-elektromechanisch systeem".
- Microelectromechanical_systems label "Microelectromechanical systems".
- Microelectromechanical_systems label "Microsystème électromécanique".
- Microelectromechanical_systems label "Mikrosystem (Technik)".
- Microelectromechanical_systems label "Sistemas microelectromecánicos".
- Microelectromechanical_systems label "Микроэлектромеханические системы".
- Microelectromechanical_systems label "نظم كهروميكانيكية صغرى".
- Microelectromechanical_systems label "微机电系统".
- Microelectromechanical_systems sameAs MEMS.
- Microelectromechanical_systems sameAs Mikrosystem_(Technik).
- Microelectromechanical_systems sameAs Sistemas_microelectromecánicos.
- Microelectromechanical_systems sameAs Microsystème_électromécanique.
- Microelectromechanical_systems sameAs MEMS.
- Microelectromechanical_systems sameAs MEMS.
- Microelectromechanical_systems sameAs MEMS.
- Microelectromechanical_systems sameAs MEMS.
- Microelectromechanical_systems sameAs Micro-elektromechanisch_systeem.
- Microelectromechanical_systems sameAs Micro_Electro-Mechanical_Systems.
- Microelectromechanical_systems sameAs m.04y_h.
- Microelectromechanical_systems sameAs Q175561.
- Microelectromechanical_systems sameAs Q175561.
- Microelectromechanical_systems sameAs Microelectromechanical_systems.
- Microelectromechanical_systems wasDerivedFrom Microelectromechanical_systems?oldid=605204056.
- Microelectromechanical_systems depiction MEMsfounding.jpg.
- Microelectromechanical_systems isPrimaryTopicOf Microelectromechanical_systems.