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- Planar_process abstract "The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which modern integrated circuits are built. The process was developed by Jean Hoerni, one of the "traitorous eight", while working at Fairchild Semiconductor.The key concept was to view a circuit in its two-dimensional projection (a plane), thus allowing the use of photographic processing concepts such as film negatives to mask the projection of light exposed chemicals. This allowed the use of a series of exposures on a substrate (Silicon) to create silicon oxide (insulators) or doped regions (conductors). Together with the use of metallization (to join together the integrated circuits), and the concept of p–n junction isolation (from Kurt Lehovec), the researchers at Fairchild were able to create circuits on a single silicon crystal slice (a wafer) from a monocrystalline silicon boule.The process involves the basic procedures of silicon dioxide (SiO2) oxidation, SiO2 etching and heat diffusion. The final steps involves oxidizing the entire wafer with an SiO2 layer, etching contact vias to the transistors, and depositing a covering metal layer over the oxide, thus connecting the transistors without manually wiring them together.Early versions of the planar process used a photolithography process using ordinary visible light.As of 2011, small features are typically made with 193 nm "deep" UV lithography.Some researchers use even higher-energy extreme ultraviolet lithography".
- Planar_process wikiPageExternalLink planar.html.
- Planar_process wikiPageExternalLink timeline.html.
- Planar_process wikiPageExternalLink 1955-Oxide.html.
- Planar_process wikiPageExternalLink 1955-Photolithography.html.
- Planar_process wikiPageExternalLink 1956-Silicon.html.
- Planar_process wikiPageExternalLink 1958-Miniaturized.html.
- Planar_process wikiPageExternalLink 1959-invention-of-the-planar-manufacturing-process-24.html.
- Planar_process wikiPageExternalLink index.html.
- Planar_process wikiPageExternalLink index.html.
- Planar_process wikiPageID "1251985".
- Planar_process wikiPageRevisionID "567690974".
- Planar_process hasPhotoCollection Planar_process.
- Planar_process subject Category:Semiconductor_device_fabrication.
- Planar_process comment "The planar process is a manufacturing process used in the semiconductor industry to build individual components of a transistor, and in turn, connect those transistors together. It is the primary process by which modern integrated circuits are built.".
- Planar_process label "Planar process".
- Planar_process label "Planartechnik".
- Planar_process label "Processo planare".
- Planar_process label "Планарная технология".
- Planar_process sameAs Planartechnik.
- Planar_process sameAs Processo_planare.
- Planar_process sameAs m.04m8wd.
- Planar_process sameAs Q1520588.
- Planar_process sameAs Q1520588.
- Planar_process wasDerivedFrom Planar_process?oldid=567690974.
- Planar_process isPrimaryTopicOf Planar_process.