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- Residual_gas_analyzer abstract "A residual gas analyzer (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in vacuum systems. Utilizing quadrupole technology, there exists two implementations, utilizing either an open ion source (OIS) or a closed ion source (CIS). RGAs may be found in high vacuum applications such as research chambers, surface science setups, accelerators, scanning microscopes, etc. RGAs are used in most cases to monitor the quality of the vacuum and easily detect minute traces of impurities in the low-pressure gas environment. These impurities can be measured down to Torr levels, possessing sub-ppm detectability in the absence of background interferences. RGAs would also be used as sensitive in-situ, helium leak detectors. With vacuum systems pumped down to lower than Torr—checking of the integrity of the vacuum seals and the quality of the vacuum—air leaks, virtual leaks and other contaminants at low levels may be detected before a process is initiated.".
- Residual_gas_analyzer wikiPageID "2431954".
- Residual_gas_analyzer wikiPageRevisionID "579314087".
- Residual_gas_analyzer hasPhotoCollection Residual_gas_analyzer.
- Residual_gas_analyzer subject Category:Spectrometers.
- Residual_gas_analyzer type Artifact100021939.
- Residual_gas_analyzer type Device103183080.
- Residual_gas_analyzer type Instrument103574816.
- Residual_gas_analyzer type Instrumentality103575240.
- Residual_gas_analyzer type MassSpectrometer103726516.
- Residual_gas_analyzer type Object100002684.
- Residual_gas_analyzer type OpticalInstrument103852280.
- Residual_gas_analyzer type PhysicalEntity100001930.
- Residual_gas_analyzer type Spectrometers.
- Residual_gas_analyzer type Spectroscope104273064.
- Residual_gas_analyzer type Whole100003553.
- Residual_gas_analyzer comment "A residual gas analyzer (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in vacuum systems. Utilizing quadrupole technology, there exists two implementations, utilizing either an open ion source (OIS) or a closed ion source (CIS). RGAs may be found in high vacuum applications such as research chambers, surface science setups, accelerators, scanning microscopes, etc.".
- Residual_gas_analyzer label "Residual gas analyzer".
- Residual_gas_analyzer sameAs m.07cmdx.
- Residual_gas_analyzer sameAs Q7315510.
- Residual_gas_analyzer sameAs Q7315510.
- Residual_gas_analyzer sameAs Residual_gas_analyzer.
- Residual_gas_analyzer wasDerivedFrom Residual_gas_analyzer?oldid=579314087.
- Residual_gas_analyzer isPrimaryTopicOf Residual_gas_analyzer.