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- Thermal_Probe_Lithography abstract "Thermal Probe Lithography (TPL) is a form of Scanning Probe Lithography used to transcribe patterns or images to a surface at the micro or nanoscale. TPL uses a micro cantilever probe with a sharp tip, usually with a radius of curvature <50 nm, that can be heated to temperatures upwards of 700°C. The heated tip can be used to evaporate solvents from a resist or to decompose and remove a mask substrate. Both of these methods result in polymer masks. A thermal probe is also useful for depositing special inks, a process known as thermal Dip Pen Lithography. Certain substrate materials such as PMMA can be indented instead of decomposed. Due to the inherent metrological properties of an AFM, these indents can be read by the movement of the scanning tip, and even deleted (by reheating the surface near the indentation). This forms the basis for a thermal data storage system.".
- Thermal_Probe_Lithography wikiPageID "29284770".
- Thermal_Probe_Lithography wikiPageRevisionID "605965187".
- Thermal_Probe_Lithography hasPhotoCollection Thermal_Probe_Lithography.
- Thermal_Probe_Lithography subject Category:Articles_created_via_the_Article_Wizard.
- Thermal_Probe_Lithography subject Category:Lithography.
- Thermal_Probe_Lithography comment "Thermal Probe Lithography (TPL) is a form of Scanning Probe Lithography used to transcribe patterns or images to a surface at the micro or nanoscale. TPL uses a micro cantilever probe with a sharp tip, usually with a radius of curvature <50 nm, that can be heated to temperatures upwards of 700°C. The heated tip can be used to evaporate solvents from a resist or to decompose and remove a mask substrate. Both of these methods result in polymer masks.".
- Thermal_Probe_Lithography label "Thermal Probe Lithography".
- Thermal_Probe_Lithography sameAs m.0fp_rkd.
- Thermal_Probe_Lithography sameAs Q7783026.
- Thermal_Probe_Lithography sameAs Q7783026.
- Thermal_Probe_Lithography wasDerivedFrom Thermal_Probe_Lithography?oldid=605965187.
- Thermal_Probe_Lithography isPrimaryTopicOf Thermal_Probe_Lithography.