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- catalog accrualPolicy "Quarterly".
- catalog alternative "J. vac. sci. technol., A, Vac. surf. films".
- catalog alternative "Journal of vacuum science & technology. A, Vacuum, surfaces, and films (Online) wid".
- catalog alternative "Journal of vacuum science and technology. A, Vacuum, surfaces, and films".
- catalog alternative "Vacuum, surfaces, and films".
- catalog contributor b174264.
- catalog contributor b174265.
- catalog created "1983-".
- catalog date "1983".
- catalog date "1983-".
- catalog dateCopyrighted "1983-".
- catalog description "Chemical abstracts 0009-2258".
- catalog description "Current physics index 0098-9819".
- catalog description "SPIN 1983-".
- catalog extent "v. :".
- catalog hasFormat "Issued also on microfilm.".
- catalog identifier "0734-2101".
- catalog isFormatOf "Issued also on microfilm.".
- catalog isReferencedBy "Chemical abstracts 0009-2258".
- catalog isReferencedBy "Current physics index 0098-9819".
- catalog isReferencedBy "SPIN 1983-".
- catalog issued "1983".
- catalog issued "1983-".
- catalog language "eng".
- catalog publisher "New York : Published for the Society by the American Institute of Physics,".
- catalog relation "Issued also on microfilm.".
- catalog relation "Journal of vacuum science and technology".
- catalog replaces "Journal of vacuum science and technology".
- catalog subject "Vacuum technology Periodicals.".
- catalog title "J. vac. sci. technol., A, Vac. surf. films".
- catalog title "Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society.".
- catalog title "Journal of vacuum science & technology. A. Vacuum, surfaces, and films".
- catalog title "Journal of vacuum science and technology. A, Vacuum, surfaces, and films".
- catalog title "Vacuum, surfaces, and films".
- catalog type "Computer network resources. local".
- catalog type "Electronic journals. lcsh".
- catalog type "text".