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- catalog accrualPolicy "Quarterly".
- catalog alternative "J. vac. sci. technol., B, Microelectronics process. phenom.".
- catalog alternative "Journal of vacuum science & technology. B. Microelectronics processing and phenomena (Online) wid".
- catalog alternative "Journal of vacuum science and technology. B, Microelectronics processing and phenomena".
- catalog alternative "Microelectronics processing and phenomena".
- catalog contributor b174266.
- catalog contributor b174267.
- catalog created "1983-1990".
- catalog date "1983".
- catalog date "1983-1990".
- catalog dateCopyrighted "1983-1990".
- catalog hasFormat "Available on microfilm.".
- catalog identifier "0734-211X".
- catalog isFormatOf "Available on microfilm.".
- catalog isReplacedBy "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena".
- catalog issued "1983".
- catalog issued "1983-1990".
- catalog language "eng".
- catalog publisher "New York : Published for the Society by the American Institute of Physics,".
- catalog relation "Available on microfilm.".
- catalog relation "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena".
- catalog relation "Journal of vacuum science and technology".
- catalog replaces "Journal of vacuum science and technology".
- catalog title "J. vac. sci. technol., B, Microelectronics process. phenom.".
- catalog title "Journal of vacuum science & technology. B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society.".
- catalog title "Journal of vacuum science & technology. B. Microelectronics processing and phenomena".
- catalog title "Journal of vacuum science and technology. B, Microelectronics processing and phenomena".
- catalog title "Microelectronics processing and phenomena".
- catalog type "Computer network resources. local".
- catalog type "Electronic journals. lcsh".
- catalog type "text".