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- catalog alternative "Optical microlithography 4.".
- catalog alternative "Optical microlithography four.".
- catalog contributor b685140.
- catalog contributor b685141.
- catalog contributor b685142.
- catalog created "c1985.".
- catalog date "1985".
- catalog date "c1985.".
- catalog dateCopyrighted "c1985.".
- catalog description "Includes bibliographies and index.".
- catalog extent "vi, 260 p. :".
- catalog identifier "0892525738 (spine : pbk.)".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 538".
- catalog issued "1985".
- catalog issued "c1985.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- catalog subject "Integrated circuits Very large scale integration Congresses.".
- catalog subject "Microlithography Congresses.".
- catalog subject "TR940 .O695 1985".
- catalog subject "TS510 .P632 v.538".
- catalog title "Optical microlithography 4.".
- catalog title "Optical microlithography IV : March 13-14, 1985, Santa Clara, California / Harry L. Stover, chairman/editor ; cooperating orgnization, the International Society for Hybrid Microelectronics.".
- catalog title "Optical microlithography four.".
- catalog type "Conference proceedings. fast".
- catalog type "text".