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- catalog contributor b1236126.
- catalog created "c1983.".
- catalog date "1983".
- catalog date "c1983.".
- catalog dateCopyrighted "c1983.".
- catalog extent "viii, 151 p. :".
- catalog identifier "0126747806".
- catalog issued "1983".
- catalog issued "c1983.".
- catalog language "eng".
- catalog publisher "Orlando : Academic Press,".
- catalog subject "Cathode sputtering (Plating process)".
- catalog subject "Thin films.".
- catalog subject "Vacuum technology.".
- catalog title "Vacuum technology, thin films, and sputtering : an introduction / R.V. Stuart.".
- catalog type "text".