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- catalog contributor b1807848.
- catalog created "1981-".
- catalog date "1981".
- catalog date "1981-".
- catalog dateCopyrighted "1981-".
- catalog description "Includes bibliographical references and index.".
- catalog description "v. 1-5. [without special title] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v. 18. Advanced MOS device physics -- v. 19. Advanced CMOS process technology -- 20. VLSI and computer architecture -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.".
- catalog extent "v. :".
- catalog hasFormat "VLSI electronics.".
- catalog identifier "0122341015".
- catalog isFormatOf "VLSI electronics.".
- catalog issued "1981".
- catalog issued "1981-".
- catalog language "eng".
- catalog publisher "New York : Academic Press,".
- catalog relation "VLSI electronics.".
- catalog subject "Integrated circuits Large scale integration.".
- catalog subject "Integrated circuits Very large scale integration.".
- catalog subject "TK7874 .V56".
- catalog tableOfContents "v. 1-5. [without special title] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v. 18. Advanced MOS device physics -- v. 19. Advanced CMOS process technology -- 20. VLSI and computer architecture -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.".
- catalog title "VLSI electronics : microstructure science / edited by Norman G. Einspruch.".
- catalog type "text".