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- catalog contributor b1866262.
- catalog contributor b1866263.
- catalog contributor b1866264.
- catalog contributor b1866265.
- catalog created "c1987.".
- catalog date "1987".
- catalog date "c1987.".
- catalog dateCopyrighted "c1987.".
- catalog description "Includes bibliographies and indexes.".
- catalog extent "xvii, 373 p. :".
- catalog hasFormat "Science and technology of microfabrication.".
- catalog identifier "0931837421".
- catalog isFormatOf "Science and technology of microfabrication.".
- catalog isPartOf "Materials Research Society symposia proceedings, 0272-9172 ; v. 76".
- catalog issued "1987".
- catalog issued "c1987.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Science and technology of microfabrication.".
- catalog subject "621.381/73 19".
- catalog subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- catalog subject "Microfabrication Congresses.".
- catalog subject "TK7874 .S33 1987".
- catalog title "Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A. / editors, R.E. Howard ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "text".