Matches in Harvard for { <http://id.lib.harvard.edu/aleph/001325332/catalog> ?p ?o. }
Showing items 1 to 27 of
27
with 100 items per page.
- catalog contributor b1869960.
- catalog contributor b1869961.
- catalog contributor b1869962.
- catalog created "c1986.".
- catalog date "1986".
- catalog date "c1986.".
- catalog dateCopyrighted "c1986.".
- catalog description "Includes bibliographies and indexes.".
- catalog description "Silicon materials science -- Epitaxy -- Diffusion and ion implantation -- Contact and interconnect materials -- Rapid thermal processing -- Dielectrics.".
- catalog extent "xvii, 535 p. :".
- catalog hasFormat "Materials issues in silicon integrated circuit processing.".
- catalog identifier "0931837375 :".
- catalog isFormatOf "Materials issues in silicon integrated circuit processing.".
- catalog isPartOf "Materials Research Society symposia proceedings, 0272-9172 ; v. 71".
- catalog issued "1986".
- catalog issued "c1986.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Materials issues in silicon integrated circuit processing.".
- catalog subject "621.381/7 19".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "TK7874 .M344 1986".
- catalog tableOfContents "Silicon materials science -- Epitaxy -- Diffusion and ion implantation -- Contact and interconnect materials -- Rapid thermal processing -- Dielectrics.".
- catalog title "Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A. / editors, Marc Wittmer, James Stimmell, Michael Strathman.".
- catalog type "Conference proceedings. fast".
- catalog type "Palo Alto (Calif., 1986) swd".
- catalog type "text".