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- catalog accrualPolicy "Quarterly".
- catalog alternative "IEEE trans. semicond. manuf.".
- catalog alternative "IEEE transactions on semiconductor manufacturing (Online) mck".
- catalog alternative "Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing".
- catalog alternative "Semiconductor manufacturing".
- catalog alternative "Transactions on semiconductor manufacturing".
- catalog contributor b2005777.
- catalog contributor b2005778.
- catalog contributor b2005779.
- catalog contributor b2005780.
- catalog contributor b2005781.
- catalog created "c1988-".
- catalog date "1988".
- catalog date "c1988-".
- catalog dateCopyrighted "c1988-".
- catalog extent "v. :".
- catalog hasFormat "Also available to subscribers via the World Wide Web.".
- catalog hasFormat "Available in microfiche and microfilm.".
- catalog identifier "0894-6507".
- catalog isFormatOf "Also available to subscribers via the World Wide Web.".
- catalog isFormatOf "Available in microfiche and microfilm.".
- catalog issued "1988".
- catalog issued "c1988-".
- catalog language "eng".
- catalog publisher "New York, N.Y. : Institute of Electrical and Electronics Engineers,".
- catalog relation "Also available to subscribers via the World Wide Web.".
- catalog relation "Available in microfiche and microfilm.".
- catalog subject "621.3815/2 19".
- catalog subject "Semiconductors Design and construction Periodicals.".
- catalog subject "TK7836 .I39".
- catalog title "IEEE trans. semicond. manuf.".
- catalog title "IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council.".
- catalog title "IEEE transactions on semiconductor manufacturing".
- catalog title "Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing".
- catalog title "Semiconductor manufacturing".
- catalog title "Transactions on semiconductor manufacturing".
- catalog type "Computer network resources. local".
- catalog type "Electronic journals. lcsh".
- catalog type "text".