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- catalog accrualPolicy "Quarterly".
- catalog contributor b2131603.
- catalog date "1973".
- catalog extent "v.".
- catalog identifier "0145-4676".
- catalog isPartOf "NBS special publication".
- catalog isReplacedBy "Semiconductor measurement technology: progress report".
- catalog issued "1973".
- catalog language "eng".
- catalog publisher "[Washington] U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.]".
- catalog relation "Methods of measurement for semiconductor materials, process control, and devices; quarterly report".
- catalog relation "NBS special publication".
- catalog relation "Semiconductor measurement technology: progress report".
- catalog replaces "Methods of measurement for semiconductor materials, process control, and devices; quarterly report".
- catalog subject "602/.1 s 621.3815/2/028".
- catalog subject "QC100 .U57 subser TK7871.85".
- catalog subject "Semiconductors Testing Periodicals.".
- catalog title "Semiconductor measurement technology. Quarterly report".
- catalog title "Semiconductor measurement technology: quarterly report.".
- catalog type "text".