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- catalog contributor b2267562.
- catalog contributor b2267563.
- catalog contributor b2267564.
- catalog contributor b2267565.
- catalog created "c1988.".
- catalog date "1988".
- catalog date "c1988.".
- catalog dateCopyrighted "c1988.".
- catalog description "Includes bibliographies and indexes.".
- catalog extent "xi, 369 p. :".
- catalog identifier "093183774X".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 106.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 106".
- catalog issued "1988".
- catalog issued "c1988.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog subject "620.1/93 19".
- catalog subject "Integrated circuits Materials Congresses.".
- catalog subject "Silicon Electric properties Congresses.".
- catalog subject "TK7871.15.S55 P65 1988".
- catalog title "Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / editors, C.Y. Wong, C.V. Thompson, K.N. Tu.".
- catalog type "text".