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- catalog contributor b2267597.
- catalog created "c1988.".
- catalog date "1988".
- catalog date "c1988.".
- catalog dateCopyrighted "c1988.".
- catalog description "Includes bibliographies and indexes.".
- catalog extent "xvii, 524 p. :".
- catalog identifier "0931837758".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 107.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 107".
- catalog issued "1988".
- catalog issued "c1988.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog subject "621.3815/22 19".
- catalog subject "Ion implantation Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "TK7871.85 .S547 1988".
- catalog title "Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A. / editors, James C. Sturm ... [et al.].".
- catalog type "text".