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- catalog contributor b2274937.
- catalog contributor b2274938.
- catalog contributor b2274939.
- catalog created "c1988.".
- catalog date "1988".
- catalog date "c1988.".
- catalog dateCopyrighted "c1988.".
- catalog description "Includes bibliographies and index.".
- catalog extent "388 p. :".
- catalog identifier "0883183676".
- catalog isPartOf "AIP conference proceedings ; no. 167".
- catalog isPartOf "American Vacuum Society series ; 4".
- catalog issued "1988".
- catalog issued "c1988.".
- catalog language "eng".
- catalog publisher "New York, NY : American Institute of Physics,".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Semiconductors Congresses.".
- catalog subject "Thin films Congresses.".
- catalog title "Deposition and growth : limits for microelectronics : Anaheim, CA, 1987 / editor, G.W. Rubloff.".
- catalog type "text".