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- catalog contributor b2275867.
- catalog contributor b2275868.
- catalog contributor b2275869.
- catalog created "c1987.".
- catalog date "1987".
- catalog date "c1987.".
- catalog dateCopyrighted "c1987.".
- catalog description "Includes bibliographies and indexes.".
- catalog extent "xvii, 485 p. :".
- catalog hasFormat "Rapid thermal processing of electronic materials.".
- catalog identifier "0931837596".
- catalog isFormatOf "Rapid thermal processing of electronic materials.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 92".
- catalog issued "1987".
- catalog issued "c1987.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Rapid thermal processing of electronic materials.".
- catalog subject "621.3815/2 19".
- catalog subject "Rapid thermal processing Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .R347 1987".
- catalog title "Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A. / editors, Syd R. Wilson, Ronald Powell, D. Eirug Davies.".
- catalog type "Anaheim (Calif., 1987) swd".
- catalog type "Conference proceedings. fast".
- catalog type "text".