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- catalog contributor b2275947.
- catalog contributor b2275948.
- catalog contributor b2275949.
- catalog contributor b2275950.
- catalog contributor b2275951.
- catalog contributor b2275952.
- catalog contributor b2275953.
- catalog created "c1985.".
- catalog date "1985".
- catalog date "c1985.".
- catalog dateCopyrighted "c1985.".
- catalog description "Includes bibliographies and indexes.".
- catalog extent "xiii, 284 p. ;".
- catalog hasFormat "Impurity diffusion and gettering in silicon.".
- catalog identifier "0931837014 :".
- catalog isFormatOf "Impurity diffusion and gettering in silicon.".
- catalog isPartOf "Materials Research Society symposia proceedings, 0272-9172 ; v. 36".
- catalog issued "1985".
- catalog issued "c1985.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Impurity diffusion and gettering in silicon.".
- catalog subject "621.3815/2 19".
- catalog subject "Diffusion Congresses.".
- catalog subject "Getters Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Defects Congresses.".
- catalog subject "TK7871.85 .I47 1985".
- catalog title "Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, Richard B. Fair, Charles W. Pearce, Jack Washburn.".
- catalog type "Conference proceedings. fast".
- catalog type "text".