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- catalog contributor b2279711.
- catalog contributor b2279712.
- catalog contributor b2279713.
- catalog contributor b2279714.
- catalog created "c1988.".
- catalog date "1988".
- catalog date "c1988.".
- catalog dateCopyrighted "c1988.".
- catalog description "Includes bibliographies and indexes.".
- catalog extent "xv, 509 p. :".
- catalog hasFormat "Laser and particle-beam chemical processing for microelectronics.".
- catalog identifier "0931837693".
- catalog isFormatOf "Laser and particle-beam chemical processing for microelectronics.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 101.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 101".
- catalog issued "1988".
- catalog issued "c1988.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Laser and particle-beam chemical processing for microelectronics.".
- catalog subject "621.381/7 19".
- catalog subject "Integrated circuits Design and construction Congresses.".
- catalog subject "Lasers Industrial applications Congresses.".
- catalog subject "Lasers in chemistry Congresses.".
- catalog subject "TK7874 .L297 1988".
- catalog title "Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko.".
- catalog type "Conference proceedings. fast".
- catalog type "text".