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- catalog contributor b2453681.
- catalog created "c1987.".
- catalog date "1987".
- catalog date "c1987.".
- catalog dateCopyrighted "c1987.".
- catalog description "Bibliography: p. 287-313.".
- catalog extent "viii, 320 p. :".
- catalog hasFormat "Laser processing of thin films and microstructures.".
- catalog identifier "0387179518 (U.S.)".
- catalog isFormatOf "Laser processing of thin films and microstructures.".
- catalog isPartOf "Springer series in materials science ; v. 3".
- catalog issued "1987".
- catalog issued "c1987.".
- catalog language "eng".
- catalog publisher "Berlin ; New York : Springer-Verlag,".
- catalog relation "Laser processing of thin films and microstructures.".
- catalog subject "621.36/6 19".
- catalog subject "Lasers Industrial applications.".
- catalog subject "TA1677 .B69 1987".
- catalog title "Laser processing of thin films and microstructures : oxidation, deposition, and etching of insulators / Ian W. Boyd.".
- catalog type "text".