Matches in Harvard for { <http://id.lib.harvard.edu/aleph/001840771/catalog> ?p ?o. }
Showing items 1 to 27 of
27
with 100 items per page.
- catalog contributor b2646874.
- catalog created "c1989.".
- catalog date "1989".
- catalog date "c1989.".
- catalog dateCopyrighted "c1989.".
- catalog description "Includes bibliographical references.".
- catalog extent "xi, 494 p. :".
- catalog hasFormat "Rapid thermal annealing/chemical vapor deposition and integrated processing.".
- catalog identifier "1558990194".
- catalog isFormatOf "Rapid thermal annealing/chemical vapor deposition and integrated processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 146.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 146".
- catalog issued "1989".
- catalog issued "c1989.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Rapid thermal annealing/chemical vapor deposition and integrated processing.".
- catalog subject "621.381/52 20".
- catalog subject "Rapid thermal processing Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .R345 1989".
- catalog subject "Vapor-plating Congresses.".
- catalog title "Rapid thermal annealing/chemical vapor deposition and integrated processing : symposium held April 25-28, 1989, San Diego, California, U.S.A. / editors, David Hodul ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "Kongress. swd".
- catalog type "text".