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- catalog contributor b2895400.
- catalog contributor b2895401.
- catalog contributor b2895402.
- catalog created "c1990.".
- catalog date "1990".
- catalog date "c1990.".
- catalog dateCopyrighted "c1990.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 496 p. :".
- catalog hasFormat "In-situ patterning.".
- catalog identifier "1558990461".
- catalog isFormatOf "In-situ patterning.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 158.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 158".
- catalog issued "1990".
- catalog issued "c1990.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "In-situ patterning.".
- catalog subject "621.381/52 20".
- catalog subject "Lasers Industrial applications Congresses.".
- catalog subject "Plasma etching Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Etching Congresses.".
- catalog subject "TK7871.85 .I49 1990".
- catalog title "In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. / editors, Anthony F. Bernhardt, Jerry G. Black, Robert Rosenberg.".
- catalog type "Conference proceedings. fast".
- catalog type "Kongress. swd".
- catalog type "text".