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- catalog contributor b2916601.
- catalog created "1980.".
- catalog date "1980".
- catalog date "1980.".
- catalog dateCopyrighted "1980.".
- catalog description "Bibliography: p. 397-400.".
- catalog extent "xv, 406 p. :".
- catalog identifier "047107828X :".
- catalog issued "1980".
- catalog issued "1980.".
- catalog language "eng".
- catalog publisher "New York : Wiley,".
- catalog subject "537.5/2".
- catalog subject "Glow discharges.".
- catalog subject "Plasma etching.".
- catalog subject "QC702.7.P6 C48".
- catalog subject "Sputtering (Physics)".
- catalog title "Glow discharge processes : sputtering and plasma etching / Brian Chapman.".
- catalog type "text".